Dynamic force lithography on the thin metallic films in the scanning probe microscope with the piezoresonance detector of local interaction

Research of dynamic force lithography (DFL) regime on thin (20 nm) Au film on the polycarbonate substrate has been conducted. One-dimensional model in elastic approximation has been suggested and calculations demonstrating existence of the DFL optimal regime have been carried out. Experimental results which have been reached in the NanoEducator scanning probe microscope with piezoresonance detector of force interaction and electrochemically edged W probe are presented. It is experimentally demonstrated that the W probe cuts the metallic film throughout and that the width of the cut is approximately 100nm and is determined by the radius of the probe. It is shown that the DFL regime in the system "metallic film-polymer" ensures creation of the 2D-nanostructures of various configuration. This regime is an easy way to create elements of nanoelectronics, nanophotonics and nanosensorics.