Gas-discharge devices forming directed flows of the off-electrode plasma. Part I. Analysis and structural features of devices

Автор: Kazansky N.L., Kolpakov V.А., Kolpakov A.I., Krichevsky S.V.

Журнал: Научное приборостроение @nauchnoe-priborostroenie

Рубрика: Обзоры

Статья в выпуске: 1 т.22, 2012 года.

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Based on the analysis of gas-discharge devices forming ion and electron beams in high-voltage gas discharge, a new approach and corresponding gas-discharge device that generates large-format directed flows of the off-electrode plasma for the production of micro- and nano-sized diffractive structures on large-format plates is proposed.

Gas-discharge device, ion and electron beams, off-electrode plasma, etching of optical materials, forming of microrelief, forming of nano-sized structures

Короткий адрес: https://sciup.org/14264767

IDR: 14264767

Статья обзорная