Solid body and liquid superficial structure study by ellipsometry considering mathematical inverse problem incorrectness. Part 6. On stability of the inverse problem solution. Box method modification

The work is devoted to the analysis of the stability of mathematically incorrect ellipsometry inverse problem, obtained on the basis of the earlier suggested method of successive approximations. It was shown, that one of the main causes of instability of the solution is the use of the traditional Box scheme in the computing process. The basic signs specifying instability of the solution of the inverse problem were determined. To increase the accuracy of computing process and maintenance of stability of the solution of the inverse problem Box complex method was significantly modified.