Studying the surface properties of a single crystal and creation of nano-dimensional structures based on MgO for electronic appliances
Автор: Rabbimov E.A., Juraeva N.M., Akhmadjonova U.T.
Журнал: Экономика и социум @ekonomika-socium
Рубрика: Основной раздел
Статья в выпуске: 6-2 (73), 2020 года.
Бесплатный доступ
The creation of nanoscale structures with new physical properties based on dielectric films is one of the main tasks of modern micro-, opto- and nanoelectronics.
Semiconductor films, cluster, uniform film, ion energies
Короткий адрес: https://sciup.org/140252613
IDR: 140252613
Статья научная
