Modifictaion of the device for detection of cleanliness and flatness of optical substrates

Автор: Izotov Pavel Yuryevich, Glyanko Mark Sergeevich, Sukhanov Sergey Vasilyevich

Журнал: Компьютерная оптика @computer-optics

Рубрика: Дифракционная оптика, оптические технологии

Статья в выпуске: 1 т.35, 2011 года.

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The current paper presents research of new construction of device for detection of flatness and cleanliness of optical substrate from the dynamic state of a liquid drop deposited on its surface. This work contains results of study of the device in application to rapid assessment of surface cleanliness of substrates made of glass, sitall and chrome.

Roughness estimation of optical surface, estimation of optical substrate cleanliness, device for rapid assessment, wettability, liquid drop spreading, image of a liquid drop

Короткий адрес: https://sciup.org/14058992

IDR: 14058992

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