Special features of metrological support in ellipsometry. New metrological criterion

Special features of metrological support in ellipsometry are examined. A new approach to metrology in ellipsometry is produced, where the spread of the measured polarizing angles Ψ and Δ over the measurement zones is studied as an objective metrological criterion. Experimental results over zone dispersion of angles Ψ and Δ on samples with ultrathin surface films are shown.