Optimization of the electro-acoustic sputtering process by the microhardness criterion

Influence of acoustic parameters (amplitude of ultrasonic oscillations A (mcm), frequency of ultrasonic oscillations (Khz), and a corner between the axis of the wave guide and the vector direction of longitudinal-twisting oscillations (degrees)) process of an electro-acoustic dusting of the protective coatings on quality of coating (micro hardness) is investigated. On the basis of the executed research the mathematical model of dependence of micro hardness of a coating from acoustic parameters of process is developed and adequacy of the received model is checked.