Specific features of a combination of a solid-state surface probe with high-resolution energy analyzers

The paper discusses a possibility of implementing a detection channel for charged particles (electrons or ions) based on a combination of a solid-state surface probe with an electrostatic energy analyzing system comprising a high-transmission high-resolution energy analyzer and an integral detector of charged particle beams. As the energy analyzer, a spectrometer based on an axially symmetric electrostatic toroidal mirror is used; it is characterized by high transmission and high energy resolution ensured by spatial superposition of two second-order focusing points and a high energy dispersion (1.5 times greater than that of hemispherical analyzers). The finest focusing is observed for charged particles moving at the angles of 28 to 55° from the axis of symmetry. The large solid angle of the incoming particle beam (two steradians) ensures the energy analyzer transmission of at least 30 % of 2 pi. The focusing is performed so that, at the beam angular divergence of 25°, the energy resolution at the base of the spectral lines can be better than ΔE/E = 0.1 %. Simple geometry of the field-forming electrodes makes the analyzer design quite compact and manufacturable.