Three-dimensional x-ray microanalysis: development and prospects of the method (analytical review)

This paper based on the analysis of the publications discusses the development of three-dimensional X-ray microanalysis (3D-micro-XRF). The progress of development for this trend during the last decade is considered. The variety of the confocal setups is shown. The realization of 3D-micro-XRF using knife-edge principle is noted. The foundation of quantification procedures in 3D-micro-XRF is mentioned. The capabilities for the application of the method are summarized. The possibility of a well-founded analytical method of principally new level is presented.