Network technique of the high-vacuum installation automation for obtaining hyperfine films on the Linux basis
Автор: Shaidurov A.V., Ovchinnikov S.G., Kosyrev N.N., Varnakov S.N.
Журнал: Сибирский аэрокосмический журнал @vestnik-sibsau
Рубрика: Математика, механика, информатика
Статья в выпуске: 4 (21), 2008 года.
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The network technique of the technological equipment automation for obtaining thin films and multilayer frames in ultra-high vacuum is developed. The server multithread program of by sputtering process control is realized. The advantages of the network approach are described.
Automation, network method, linux-сервер, vacuum, linux-server, multithread
Короткий адрес: https://sciup.org/148175752
IDR: 148175752
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