Control system for a scanning-probe microscope

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This paper describes a modern implementation of a control system for the scanning-probe microscope. The core of the system is a high-performance programmable embedded controller based on the modules MEC5091 and ADEPT. A personal computer is used as a console for control, display, and as a data processing unit. A programming system is available, so it is possible to define the control algorithm using the SPML language.

Короткий адрес: https://sciup.org/14264294

IDR: 14264294

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