Effects of femtosecond laser pulses on the phase composition and photoluminescence of polycrystalline diamond films grown by the CVD method

The effect of femtosecond laser pulses with a wavelength of 800 nm, a power of 9.5 nJ per pulse, a duration of 20 fs, and a repetition rate of 75 MHz on photoluminescence and the ratio of graphite and diamond phases in polycrystalline diamond films grown by the PECVD method, doped with boron and saturated with NV-centers was studied. As a result of studying the Raman scattering (RS) and photoluminescence spectra in the spectral range of 500-800 nm, it was found that the effects of femtosecond laser radiation of the specified power on polycrystalline diamond films leads to a decrease in the concentration of sp2 nanoclusters in the layer, but does not cause significant changes in photoluminescence associated with NV centers, manifesting itself only in a broadening of the luminescence peaks by 4-5%.