SELECTION OF A SUPERLUMINESCENT RADIATION SOURCE FOR THE MICROINTERFERENCE METHOD OF SURFACE RELIEF CONTROL

The paper considers the problem of choosing a light source for the microinterference method of surface relief control. Currently, great attention is being paid to superluminescent LEDs, because they are the optimal light sources for low-coherence interferometry due to their technical characteristics. The use of the spectral method to identify the peak wavelength of radiation, the width of the source spectrum, which determines the coherence length, is significant, therefore this work is relevant and promising. The purpose and task of the study are set. The functional diagram of the measuring unit and the monochromator unit are given. Graphical dependences of the relative spectral sensitivities of superluminescent LEDs on different heterostructures are obtained and the coherence lengths for each light source are calculated.