Diffractive-refractive achromatic objectives for EUV-range
Автор: Greysukh Grigoriy Isaevitch, Ezhov Eugeniy Grigorievich, Levin Ilya Anatolievich, Stepanov Sergei Alekseevich
Журнал: Компьютерная оптика @computer-optics
Рубрика: Дифракционная оптика, оптические технологии
Статья в выпуске: 1 т.35, 2011 года.
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The dispersing model of the optical material allowing to use in EUV-range well-known optical design programs is presented. Diffractive-refractive photolithographic objectives achromatized by diffractive-refractive corrector including Fresnel lens are designed. It is shown, that such objectives in an EUV-range are capable to compete with mirror objectives which were considered earlier as the uncontested.
Extreme ultraviolet, refractive fresnel lens, dispersion, achromatization, secondary spectrum, diffractive-refractive objective, telecentricity, diffractive lens, confocal objective, nanolithography
Короткий адрес: https://sciup.org/14058986
IDR: 14058986
