Active metamaterial based on integral NEMS structures

The conception of the integrated nanoelectromechanical systems (NEMS) formation method is overlooked in this article. This method is based on an original combination of self-organizing and self-aligning processes. The functionality of the proposed NEMS structures and possible applications of nanomaterial, formed by a two-dimensional array of such structures are discussed. The results of the experiments are directed to propose NEMS technology realization.