Analysis of the probe characteristics-conditioned methodical error of object's geometric parameters measurements in sem by the probe defocusing method

The methodological error of object's geometrical parameters measurement using the SEM electron probe defocusing method is estimated. This error is caused by the dependence of the measurement result on the parameters of the probe. It is shown that this error can be reduced by choosing the optimal parameters of the probe, in which the actual measurement conditions best correspond to the requirements of the theoretical model. As a result, the value of the methodical error is reduced to the level random error of measurements (5-10 nm).