Analysis of perspective materials for micro- and nanoelectronics and production technology
Автор: Algrfi M.a.Ja.
Журнал: Теория и практика современной науки @modern-j
Рубрика: Основной раздел
Статья в выпуске: 7 (37), 2018 года.
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The main purpose of the study is to study and analyze promising technologies for the production of materials for micro - and nanoelectronics. The main tasks were to collect information and study relevant data on promising technologies for producing materials for micro - and nanoelectronics.
Molecular beam epitaxy, pulsed laser deposition, spraying, chemical vapor deposition, electrospinning, sol-gel method
Короткий адрес: https://sciup.org/140273692
IDR: 140273692
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