Automation of magnitoellipsometric in situ measurements on the ultrahigh-vacuum complex for synthesis and research of materials of spintronics
Автор: Lyaschenko S.A., Varnakov S.N., Tarasov I.A., Shevtsov D.V., Ovchinnikov S.G.
Журнал: Сибирский аэрокосмический журнал @vestnik-sibsau
Рубрика: Технологические процессы и материалы
Статья в выпуске: 4 (44), 2012 года.
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The article is a presentation of results of modernization of magnetic-ellipsometric complex created by group of authors. Automation ofprocesses of hardware component control is carried out and algorithms of processing of signals of magnetic ellipsometer are realized. Possibilities of the created system were shown on the example of technological cycle of production and in situ of research of structural, optical and magnetic properties of nanostructure of Fe/SiO 2/Si(100).
Ultrahigh-vacuum technology of multilayered nano-structures, spectral ellipsometry, kerr effect
Короткий адрес: https://sciup.org/148176895
IDR: 148176895