Numerical simulation of creeping discharge as an ion source for elemental mass spectrometrical analysis of dielectrics

Based on the two-temperature Lagrangian hydrodynamic code a numerical model describing evolution of creeping discharge initiated on a dielectrical surface is proposed. The numerical simulations of the experimental conditions were performed. The simulation results and experimental data on plasma charge composition are in agreement. The ways on optimization of creeping discharge as an ion source for elemental mass spectrometrical analysis of dielectrics are discussed.