Mass air flow meter for the automotive industry on the basis of the flow micro sensor of the thermal type

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On the basis of a thermal type micro sensor the pilot model of the air mass flow meter for the automotive industry was developed and made. The design and the manufacturing technology of a micro sensor are described. The procedure and results of tests of the mass flow meter are presented.

Mems, thermal flow sensor, mass flow rate, heat mass transfer, mass flow meter

Короткий адрес: https://sciup.org/14264748

IDR: 14264748

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