Liquid flow meter on the base of thermo anemometric flow microsensor
Автор: Sazhin O.V., Pervushin Yu. V.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Приборы и устройства
Статья в выпуске: 2 т.23, 2013 года.
Бесплатный доступ
An analytical model of thermo anemometric flow sensor has been developed. The thermo anemometric flow microsensor on the base of the doped polycrystalline silicon was made. A prototype of the liquid flow meter has been designed. Results of the flow meter test are presented.
Mems, flow sensor of thermal type, heat mass transfer, liquid flow meter
Короткий адрес: https://sciup.org/14264851
IDR: 14264851
Статья научная
