Factor analysis of inelastic electron scattering cross section spectra of iron monosilicide FeSi
Автор: Igumenov A. Yu., Parshin A. S., Andryushchenko T. A.
Журнал: Siberian Aerospace Journal @vestnik-sibsau-en
Рубрика: Technological processes and material science
Статья в выпуске: 1 vol.20, 2019 года.
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The inelastic electron scattering cross-section spectra of FeSi silicide were calculated from the experimental reflected electron energy loss spectra as the product of the average inelastic mean free path and the differential cross section of the inelastic electron scattering. To inelastic electron scattering cross-section spectra study, factor analysis was used. This method allowed us to quantitatively separate the surface and bulk contributions to the spectra, and determine the energy of the bulk plasmon more accurately than it is possible using traditional methods. Inelastic electron scattering cross-section spectra (Kλ-spectra) are the products of the average inelastic mean free path λ and the differential inelastic scattering cross-section K (E0, E0 – E), where E0 and E are the energies of the primary and reflected electrons, respectively. The advantage of inelastic electron scattering cross section spectroscopy is that, unlike the reflected electron energy loss spectra, the Kλ-spectra exclude losses due to multiple excitations, and the intensities are determined in absolute units. These spectra are also more sensitive to changes in the energy of the primary electrons and the angle of emission. Inelastic electron scattering cross-section spectroscopy allows to determine the element composition with much greater accuracy than the traditional method of reflected electron energy loss spectroscopy. In this work, factor analysis is used to study the inelastic electron scattering cross section spectra of the FeSi silicide. This method allowed to solve the actual problem of separating spectra into contributions of a different origin, quantify them and determine the energies of a bulk plasmon more accurately compared with traditional methods. The study of electron energy loss processes by isolating contributions of different origin in the inelastic electron scattering cross section spectra is one of the urgent problems of electron spectroscopy, which can be used to assess the effect of surface excitations in REELS, XPS and AES.
Inelastic electron scattering cross-section spectra, electron energy loss spectroscopy, factor analysis, iron silicides
Короткий адрес: https://sciup.org/148321665
IDR: 148321665 | DOI: 10.31772/2587-6066-2019-20-1-99-105
Список литературы Factor analysis of inelastic electron scattering cross section spectra of iron monosilicide FeSi
- Galkin N. G., Polyarnyi V. O., Gouralnik A. S. Self-organization of β-FeSi2 islands on Si(111)7×7. Thin Solid Films. 2004, Vol. 464–465, P. 199–203.
- Ohtsu N., Oku M., Satoh K. Dependence of corelevel XPS spectra on iron silicide phase. Applied Surface Science. 2013, Vol. 264, P. 219–224.
- Tougaard S., Chorkendorff. I. Differential inelastic electron scattering cross sections from experimental reflection electron-energy-loss spectra: Application to background removal in electron spectroscopy. Physical Review B. 1987, No. 35, 13, P. 6570–6577.
- Jin H., Yoshikawa H., Iwai H. [et al.] Inelastic Scattering Cross Section of Si Determined from Angular Dependent Reflection Electron Energy Loss Spectra. Journal of Surface Analysis. 2009, Vol. 15, No. 3, P. 321–324.
- Jin H., Shinotsuka H., Yoshikawa H. et al. Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method. Journal of applied physics. 2010, No. 107, P. 083709, 1–11.
- Jin H., Shinotsuka H., Yoshikawa H. et al. Evaluation of robustness to surface conditions of the target factor analysis method for determining the dielectric function from reflection electron energy loss spectra: Application to GaAs. Surface and Interface Analysis. 2013, Vol. 45, No. 6, P. 985–992.
- Gergely G. Elastic backscattering of electrons: determination of physical parameters of electron transport processes by elastic peak electron spectroscopy. Progress in Surface Science. 2002, No. 71, P. 31–88.
- Orosz G. T. Gergely G., Gurban S. et al. Experimental determination of electron inelastic scattering cross-sections in Si, Ge and III–V semiconductors. Vacuum. 2003, No. 71, P. 147–152.
- Tougaard S. Quantitative Analysis of the Inelastic Background in Surface Electron Spectroscopy. Surface and Interface Analysis. 1988, No. 11, P. 453–472.
- Andryushechkin B. V., El'cov K. N., Klimov A. N. [Experimental techniques, methods and methods of work with Halogens on the surface of metals]. Trudy instituta obshhej fiziki. Moscow, Nauka Publ., 2003, Vol. 59, P. 23–44 (In Russ.).
- Malinowski E. R., Howery D. G. Factor Analysis in Chemistry. New York, Wiley, 1980, 207 p.
- Gaarenstroom S. W. Application of Auger lineshapes and factor-analysis to characterize a metal-ceramic interfacial reaction. Journal of Vacuum Science and Technology. 1982, Vol. 20, P. 458–461.
- Steffen J., Hofmann S. Use of factor analysis with O KLL Auger spectra to distinguish chemisorption and oxide formation on Ni. Surface Science. 1988, Vol. 202, P. L607–L611.
- Hofmann S., Steffen J. Factor analysis and superposition of Auger electron spectra applied to room temperature oxidation of Ni and NiCr21Fe12. Surface And Interface Analysis. 1989, Vol. 14, P. 59–65.
- Ruano S., Gustavo D., Pomiro F. Surface chemical reactions induced on pyrite by ion bombardment. Surface Science. 2018, Vol. 667, P. 138–147.
- Parshin A. S., Igumenov A. Yu., Mikhlin Yu. L. et al. [Reflection electron energy loss spectroscopy of iron monosilicide]. Izvestiya Vysshikh Uchebnykh Zavedenii. Fizika. 2016, Vol. 59, No. 10, P. 82–86 (In Russ.).
- Parshin A. S., Igumenov A. Yu., Mikhlin Yu. L. et al. Reflection electron energy loss spectroscopy of structures based on silicon and transition metals. IOP Conference Series: Materials Science and Engineering. XX International Scientific Conference Reshetnev Readings- 2016. 2017, Vol. 255, P. 012019, 1–7. Doi:10.1088/1757-899X/255/1/012019.
- Parshin A. S., Igumenov A. Yu., Mikhlin Yu. L. et al. Comparative Analysis of the Characteristic Electron Energy-Loss Spectra and Inelastic Scattering Cross- Section Spectra in Fe. Physics of the Solid State. 2016, Vol. 58, No. 5, P. 908–914.
- Parshin A. S., Igumenov A. Yu., Mikhlin Yu. L. et al. Electron Spectroscopy of Iron Disilicide. Technical Physic. 2016, Vol. 61, No. 9, P. 1418–1422.
- Parshin A. S., Igumenov A. Yu., Mikhlin Yu. L. et al. On the Fine Structure of Spectra of the Inelastic-Electron-Scattering Cross Section and the Si Surface Parameter. Semiconductors. 2015, Vol. 49, No. 4, P. 423–427.
- Igumenov A. Yu., Parshin A. S., Mikhlin Yu. L. et al. [Raschet veroyatnosti generacii poverhnostnyh vozbuzhdenij ehlektronami, otrazhennymi ot poverhnosti Si]. Vestnik SibGAU. 2014, No. 4 (56), P. 230–235 (In Russ.).
- Tougaard S. QUASES – Software packages to characterize surface nano-structures by analysis of electron spectra. Available at: http:// www.quases.com (accessed: 15.10.2018).
- Tougaard S., Chorkendorff. I. Differential inelastic electron scattering cross sections from experimental reflection electron-energy-loss spectra: Application to background removal in electron spectroscopy. Physical Review B. 1987, No. 35, 13, P. 6570–6577.
- Tougaard S. Universality Classes of Inelastic Electron Scattering Cross-sections. Surface And Interface Analysis. 1997, No. 25, P. 137–154.
- Lifshits V. G., Lunyakov Yu. V. Spektry KhPEE poverkhnostnykh faz na kremnii [EELS spectra of surface phases on silicon]. Vladivostok, Dal'nauka Publ., 2004, 315 p.
- Raether H. Surface Plasmons on Smooth and Rough Surfaces and on Gratings. Berlin, Springer-Verlag, 1988, 140 p.
