Gas-discharge devices forming directed flows of the off-electrode plasma. Part II. Results of updating. New devices
Автор: Kazansky N.L., Kolpakov V.А., Kolpakov A.I., Krichevsky S.V., Podlipnov V.V.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Приборы микро- и наноисследований
Статья в выпуске: 2 т.22, 2012 года.
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A new class of gas-discharge devices forming directed flows of the off-electrode plasma for the production of micro- and nano-sized diffractive structures on large-format wafers is described.
Gas-discharge device, modernization, generator, focusator, off-electrode plasma, etching of optical materials, microrelief formation, nano-sized structures formation
Короткий адрес: https://sciup.org/14264789
IDR: 14264789
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