Gas sensors on basis of anodic films

Physical and chemical fundamentals of sensors of combustible and toxic gases anodic oxide films of valve metals (Zr, Ti, Nb) are developed. First, new technologies are applied for formation of preset oxide structures, doped by impurities, including films of the high-temperature modification of ZrO2 stabilized by calcium. The method of micro spark oxidation in water solutions of required salts was used. Second, the optimum mode and the mechanism of functioning of a sensor in the area of low temperature border of solid-electrolyte conductivity 600K of ZrO2, TiO2 and Nb2O5 is investigated and established. This mechanism consists in modulation of EMF of oxidation by the electronic component arising as a result of heterogeneous catalytic reactions of donor gases with chemically sorbet oxygen of the form O-.