Ion-plasma layer modification method based on polycrystalline diamond film

The structure and properties of a polycrystalline diamond film layer after irradiation with N+ and He+ ions with an energy of 7 keV were studied. According to Raman spectroscopy-data, in the layer irradiated with nitrogen ions, in addition to diamond clusters with a high degree of crystallinity, there is a significant proportion of carbon with the sp2-type of hybridization. X-ray photoelectron spectroscopy shows that after irradiation with helium ions, the sp2-carbon content in the graphitized diamond layer increases by 1.7 times due to a significant decrease in the proportion of C-N bonds. There is also an almost twofold increase in the luminescence intensity from NV centers and a noticeable weakening in the formation of the contribution from the С-N and C=N bonds after irradiation with He+ ions.