Use of information technology in physical sciences research

The article discusses the use of information technology through the example of COMSOL Multiphysics software package and MathCad mathematical program for constructing models of physical processes and developing mathematical models of ion and electron beams’ heat exposure on processing surfaces. Numerical calculations have shown that experimental parameters, such as temperature and heating (cooling) time, cause structural transformations in samples during electron-beam surface processing. Modeling using the ion beam sputtering method made it possible to calculate theoretical target sputtering yield according to the Sigmund theory. Calculations made it possible to recommend optimal parameters for growth processes.