INVESTIGATION OF AN EXPERIMENTAL INTERFERENCE INSTALLATION WITH SPATIAL MICROSCANNING TO CONTROL THE GEOMETRIC PARAMETERS OF THE SURFACE

The paper highlights the possibility of using an experimental interference setup with spatial microscanning to control the geometric parameters of the surface. Obtaining high-precision and reliable information about the geometric parameters of the surface of objects has always been an important task of metrology, so this work is relevant and promising. The paper defines the purpose and sets the task of the study. An optical scheme, a mode of measuring the surface microrelief using an experimental interference device, as well as the optical film for determining the angular amplitude of vibrations are presented. The formulas make it possible to calculate all the parameters of the micro-scanning of the probing spot on the surface of the object with an experimental interference installation.