INVESTIGATION OF OPTICAL FLAT SURFACES OF BEAM-SPLITTING PLATES BY MEANS OF COHERENT OPTICS

The article presents an experimental setup for measuring the geometric parameters of optical surfaces of details. The relevance of the work is shown since obtaining high-precision and reliable information about the geometric parameters of surfaces has always been an important task of metrology. The paper highlights the optical layout of the interferometer, as well as the technical and operational characteristics of the experimental setup. The objects and method of research are determined. Interferograms were obtained from the surfaces of beam splitters of various manufacturers. The images of interference fields were analyzed, and the main parameters of wave fronts were revealed. The optical surfaces were controlled by an experimental setup with an accuracy of not worse than 0.05 λ. The reflective coatings of beam splitters were studied, and the dependences of the reflection coefficient on the x and y coordinates were obtained. Comparative analysis revealed the preferable option for modern automated interferometers.