Researching the features of multibeam laser thermochemical recording of diffractive microstructures

The theoretical and experimental study of the laser thermochemical writing of diffractive microstructures at the multibeam and multipass regime were presented. The diffractive structures with the spacing of 1.6 microns on thin chromium film were received using laser writing beam divided for 5 parts by Dammann grating. Exposure of the chromium film was carried out at 5 runs to improve the accuracy of recording. Estimation method of the temperature fields and oxide distribution in film was proposed. Carried out calculations shown that despite the mutual influence of temperature fields from different beams, the recording resolution is high enough for obtaining the micron-scale structures. Using the multipass regime as shown increases the contrast and precision of tracks while the high resolution saves.