INVESTIGATION OF THE SURFACE OF A FILM REFLECTOR BASED ON SiO2–ZrO2–P2O5–CaO FOR AN OPTICAL INTERFEROMETER SYSTEM

The paper considers the possibility of using an experimental interference installation with a reference wavefront formed by diffraction of a laser beam focused on a micrometer hole for surface control. Obtaining highprecision and reliable information about the geometric parameters of the surface of objects has always been an important task of metrology, therefore this work is relevant and promising. The paper defines the purpose and sets the task of the study. The appearance and optical scheme are given, as well as the operation of the scheme is described. The range (peak-to-valley, R) and standard deviation (RMS, ) in micrometers of the surface, as well as the distribution of the reflection coefficient in two directions in x and y, are obtained.