An investigation into the SHS compacting of multicomponent targets based on TiB for cathodic arc deposition

Автор: Altukhov S.I., Ermoshkin A.A., Smetanin K.S., Fedotov A.F., Lavro V.N., Latukhin E.I., Amosov A.P.

Журнал: Известия Самарского научного центра Российской академии наук @izvestiya-ssc

Рубрика: Физика и электроника

Статья в выпуске: 4-1 т.13, 2011 года.

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The effect of aluminum and silicon-containing compounds of titanium-boron system on technological properties of SHS-compacted targets for arc-PVD has been investigated. The charge mixture of the working layer should be prepared based upon the sufficient content of titanium matrix in the synthesis products to obtain defect-free workpieces and targets. Estimated mass concentration of free titanium in the Ti - B - Al and Ti - B - Si systems should be at least 35% and 10% respectively. All the studied compositions of the Ti - B - Al - Si system are non-manufacturable both at SHS compacting of multilayer workpieces and at the machining.

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Multicomponent targets, shs compacting, cathodic arc deposition (arc-pvd)

Короткий адрес: https://sciup.org/148200127

IDR: 148200127

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