Research of the dependence of the sensitivity of an electrochemical motion sensor of the planar type on the geometric parameters of the electrode system

The work presents experimental studies of the conversion coefficient of electrochemical motion sensors depending on the geometric characteristics of the planar converting element used. The electrodes of the converting elements with the required geometry are made using screen printing from conductive pastes followed by precision laser processing of the print. The measurements were carried out using an electrodynamic actuator that simulates the forces of inertia arising under the influence of external mechanical signals. The experimental data are in good agreement with the previously developed theoretical models and, at the same time, allow us to clarify the areas of applicability of the models. The practical significance of the results of the work consists in determining the geometric characteristics that provide the highest sensitivity for transforming planar-type elements.