Measurement of the thickness of cobalt and iron thin films by X-ray reflectometry

This article presents the results of thickness measurements and surface roughness analysis of thin films of iron (FeO) and cobalt (CoO) oxides using X-ray reflectometry. The main purpose of the study was to measure the reflectometric curves of these materials, and then simulate these curves to adapt the thickness and roughness parameters. The developed technique makes it possible to improve the control of quality and characteristics of finished elements based on thin films, providing higher accuracy of compliance of experimental data with theoretical models. The results of the work are important for the further development of technologies for the production and application of thin films in various innovative fields.