EXPERIMENTAL STUDY OF INTERFERENCE SETUP USING WHITE LIGHT SOURCE FOR SURFACE MICRORELIEF MONITORING
Автор: E. E. Maiorov , V. P. Pushkina , R. B. Guliyev , A. V. Dagaev
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Физика приборостроения
Статья в выпуске: 2, 2025 года.
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The study highlights the problem of metrology of non-smooth surfaces and the identification of the technical characteristics of the developed interferometric installation, where a white light diode was used as a radiation source. Obtaining high-precision information about the geometry of an optical or non-smooth surface is a significant problem for metrological support, and interference devices and complexes using light sources that block the laser mode are able to provide the researcher with such information. The metrological parameters of the experimental setup are investigated: the range, measurement error, and amplitude of the interference signal. The experimental results obtained are presented in the form of technical specifications.
Light wavelength, contrast of the interference field, coherence length, measurement error, measurement range, amplitude of the interference signal, diameter of the light spot
Короткий адрес: https://sciup.org/142244853
IDR: 142244853