Electric circuits of capacitive pickups in an RR-type micromechanical gyroscope

The paper presents a model of capacitive pickups for the RR-type micromechanical gyroscope (MMG), which is constructed in the form of an equivalent electric circuit with inter-electrode and stray capacitances. A method for calculating those capacities is described. The resolution of MMG fabricated by the silicon-on-insulator (SOI) method has been determined. The effect of the capacitive pickups' excitation voltage on the suspension resonant frequency has been estimated.