Transmission electron microscope calibration by relief structures cross-sections
Автор: Vasiliev A.L., Gavrilenko V.P., Kovalchuk M.V., Mityukhlyaev V.B., Ozerin Y.V., Rakov A.V., Roddatis V.V., Todua P.A., Filippov M.N.
Журнал: Труды Московского физико-технического института @trudy-mipt
Рубрика: Нанотехнология и нанометрия
Статья в выпуске: 1 (17) т.5, 2013 года.
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We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its dements. It is fabricated using ion milling. This reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (about 30000 times).
Electron microscopy, magnification standard, relief structures
Короткий адрес: https://sciup.org/142185892
IDR: 142185892
