Monitoring a spatial intensity distribution of transmitted and reflected light in a diffractive structure
Автор: Belousov Dmitrij Aleksandrovich, Poleshchuk Alexander Grigorievich, Khomutov Vladimir Nikolayevich
Журнал: Компьютерная оптика @computer-optics
Рубрика: Дифракционная оптика, оптические технологии
Статья в выпуске: 5 т.39, 2015 года.
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We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a ±80° solid angle and a 360° azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.
Diffractive optics, computer optics, synthesized holograms, measuring system, diffractive optical elements (does)
Короткий адрес: https://sciup.org/14059410
IDR: 14059410 | DOI: 10.18287/0134-2452-2015-39-5-678-686
