Laue diffraction of X-ray beams in a multilayer structure

The Laue diffraction theory of X-ray microbeams in multilayers (MLs) has been developed. The solution for calculating Xray reciprocal space maps has been obtained. The pendulum (Pendellösung) effect for perfect and imperfect MLs has been demonstrated. The numerical simulation of Laue diffraction in Mo/Si multilayers with boundary conditions in the case of geometrical optics and the Fresnel approximation has been carried out. For X-ray microbeams, the scattering at the edges of collimators and slits of the diffractometer should be taken into account.