The linear motions with micron and submicronic accuracy

Spheres of application the drives of precise linear motions are considered, the characteristic complexes of requirements to parameters of output link movements are defined. System analysis of possibilities of increase the technical characteristics of linear actuator is carried out, the conclusion on prospects of use the electromechanical mechatronic modules (for positioning with accuracy about 1 nanometer and continuous moving with kinematic accuracy about 1 micron) is drawn.