Localized synthesis method for highly oriented carbon nanotubes in vacuum microelectronics application
Автор: Baturin A.S., Kuzin A.A., Leychenko A.S., Negrov D.V., Starikov P.A.
Журнал: Труды Московского физико-технического института @trudy-mipt
Рубрика: Нанотехнология и нанометрия
Статья в выпуске: 1 (17) т.5, 2013 года.
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The problem of area-selective highly oriented carbon nanotube plasma enchanced chemical vapor deposition synthesis is studied. Nanotube array characteristics dependences on growth parameters are analyzed. Local field emission characteristics are studied. Functioning of a field emission diode with synthesized nanotubes is analyzed.
Carbon nanomaterials, nanotubes, field emission, chemical vapor deposition, directed growth, nickel catalyzer, field emission probing, planar cathode
Короткий адрес: https://sciup.org/142185882
IDR: 142185882
