Method of quality improvement of electronic components at different stages of manufacture
Автор: Shestakova T.V.
Журнал: Известия Самарского научного центра Российской академии наук @izvestiya-ssc
Рубрика: Физика
Статья в выпуске: 5-2 т.11, 2009 года.
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The research technique of technological process of integrated circuits manufacture, in which basis lay classical methods of correlation analysis and original method of mathematical modeling by results of passive experiment in conditions of real manufacture is observed.
Integrated circuits, technological process, mathematical modeling
Короткий адрес: https://sciup.org/148198763
IDR: 148198763
Статья научная
