The method for calculating of single-axis micro-opto-electro-mechanical angular velocity transducer
Автор: Busurin V.I., Pham A.T., Korobkov V.V., Medvedev V.M., Zheglov M.A.
Рубрика: Приборостроение, метрология и информационно-измерительные приборы и системы
Статья в выпуске: 2 т.18, 2018 года.
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The method for calculating of single-axis micro-opto-elctro-mechanical (MOEM) angular velocity transducer based on the optical tunneling effect (OTE) is conceived. This paper is created the algorithm and the software development that allows calculating transducer’s basic parameters in providing of defined technical requirements
Moem, angular velocity, transducer, method, characteristics, optical tunneling effect
Короткий адрес: https://sciup.org/147155269
IDR: 147155269 | DOI: 10.14529/ctcr180209
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