Microfluidic chips of glass materials
Автор: Evstrapov A.A., Lukashenko T.A., Rudnitskaya G.E., Bulyanitsa A.L., Kurochkin V.E., Gusev V.S., Ivanov O.G., Berkutova I.F., Savitskaya A.A.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Приборы микро- и наноисследований
Статья в выпуске: 2 т.22, 2012 года.
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Microfluidic chips are the foundation of modern analytical instruments for scientific studies and medical diagnostics. The article deals with the steps for creating microfluidic chips made of glass materials by means of photolithography, wet etching with the following thermal bonding. The influence of the processes and stages of production on the characteristics and properties of the chips was investigated. Technology used in the production of small amounts of analytical chips for various purposes are discussed.
Microfluidic chip, photolithography, wet etching, microstructure, sealing, spectrophotometry, scanning near-field microscopy
Короткий адрес: https://sciup.org/14264787
IDR: 14264787
