Gas-dynamic interface for mass-spectrometer creeping discharge ion source for elemental analysis of dielectrics

It is offered to use quadrupole collisional cell as a gas-dynamic interface for a creeping discharge (CD) ion source for elemental analysis of dielectrics. It will reduce the energy distribution width of the ions from the CD ion source and accommodate the source to use with low resolution mass-spectrometers. The width of ions energy distribution from CD ion source was experimentally estimated. The results of measurements were used for calculation model creation. By this model the electric fields and the energy distribution of ions were calculated, conditions which lead to energy distribution reduction to 2÷3 eV were found. The optimal mode of gas inlet to the collision cell and the parameters of high-frequency power supply were chosen.