Low-voltage miniaturized electron-optical systems: review

Low-voltage miniaturized electron-optical systems, which are also called micro-columns, represent an independent direction in the field of electronic optics and are the basis of low-voltage miniature electron microscopes, multi-column lithographs and electronic holography systems. The review contains works on micro-columns with various electron-optical schemes, including modeling of electric field distribution, electronic trajectories, aberrations and spatial resolution, as well as a description of the used electronic sources and technologies for micro columns manufacturing.