Низковольтные миниатюризованные электронно-оптические системы. Обзор

С.О. Вересов; О.М. Горбенко; А.О. Голубок; S.O. Veresov; O.M. Gorbenko; A.O. Golubok

Научные статьи \ Математика. Естественные науки \ Физика \ Электричество. Магнетизм. Электромагнетизм

Низковольтные миниатюризованные электронно-оптические системы. Обзор

С.О. Вересов О.М. Горбенко А.О. Голубок

Журнал: Научное приборостроение @nauchnoe-priborostroenie

Рубрика: Приборы и системы

Статья в выпуске: 4, 2025 года.

Бесплатный доступ

Низковольтные миниатюризованные электронно-оптические системы, которые также называют микроколоннами, представляют собой самостоятельное направление в области электронной оптики и являются основой низковольтных миниатюрных электронных микроскопов, многоколоночных литографов и систем электронной голографии. В обзоре собраны работы по микроколоннам с различными электронно-оптическими схемами, включая моделирование распределения электрического поля, электронных траекторий, аберраций и пространственного разрешения, а также описание используемых электронных источников и технологий изготовления микроколонн.

низковольтная электронная микроскопия \ миниатюрные электронно-оптические системы \ микроколонны \ электростатические микролинзы \ точечные источники электронов \ пространственное разрешение \ аберрации электронно-оптических систем \ групповые технологии микроэлектроники \ кремниевые технологии

Low-voltage miniaturized electron-optical systems: review

Low-voltage miniaturized electron-optical systems, which are also called micro-columns, represent an independent direction in the field of electronic optics and are the basis of low-voltage miniature electron microscopes, multi-column lithographs and electronic holography systems. The review contains works on micro-columns with various electron-optical schemes, including modeling of electric field distribution, electronic trajectories, aberrations and spatial resolution, as well as a description of the used electronic sources and technologies for micro columns manufacturing.

Список литературы Низковольтные миниатюризованные электронно-оптические системы. Обзор

1. Knoll M., Ruska E. Das elektronenmikroskop // Zeitschriftfür Physik. 1932. Vol. 78. P. 318–339. DOI: 10.1007/BF01342199
2. Joy D.C., Joy C.S. Low voltage scanning electron microscopy // Micron. 1996. Vol. 27, no. 3-4. P. 247–263. DOI:
10.1016/0968-4328(96)00023-6
3. Frank L., Hovorka M., Konvalina I., Mikmekova S., Müllerova I. Very low energy scanning electron microscopy // Nuclear Instruments and Methods in Physics Reаsearch, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2011. Vol. 645, no. 1. P. 46–54. DOI: 10.1016/j.nima.2010.12.214
4. Muray L.P. Developments in low-voltage microscopy instrumentation // Scanning. 2011. Vol. 33. P. 155–161. DOI: 10.1002/sca.20245
5. Fink H.W. Point source for ions and electrons // Physica Scripta. 1988. Vol. 38, no. 2. P. 260–263. DOI: 10.1088/0031-8949/38/2/029
6. Crewe D.A., Perng D.C., Shoaf S.E., Feinerman A.D. Micromachined electrostatic electron source // Journal of Vacuum Science & Technology B. 1992. Vol. 10. P. 2754–2758. DOI: 10.1116/1.585996
7. Kratschmer E., Kim H.S., Thomson M.G.R., Lee K.Y., Rishton S.A., Yu M.L., Chang T.H.P. Sub-40 nm resolution 1 keV scanning tunneling microscope fieldemission microcolumn // Journal of Vacuum Science & Technology B. 1994. Vol. 12. P. 3503–3507. DOI: 10.1116/1.587459
8. Chang T.H.P., Thomson M.G.R., Yu M.L., Kratschmer E., Kim H.S., Lee K.Y., Rishton S.A., Zolgharnain S. Electron beam technology – SEM to microcolumn // Microelectronic Engineering. 1996. Vol. 32. P. 113–130. DOI: 10.1016/0167-9317(95)00366-5
9. Park J.-Y., Choi H.-J., Lee Y., Kang S., Chun K., Park S., Kuk Y. Construction of STM Aligned Electron Field Emission Source // Journal de Physique IV France. 1996. Vol. 06, nо. C5. P. C5-285–C5-289. DOI: 10.1051/jp4:1996546
10. Park J.-Y., Lera J.-D., Yakshin M.A., Choi S.S., Lee Y., Chun K.J., Lee J.D., Jeon D., Kuk Y. Fabrication of multiple microcolumn array combined with field emission array // Journal of Vacuum Science & Technology B. 1997. Vol. 15. P. 2749–2753. DOI: 10.1116/1.589720
11. Park J.-Y., Lera J.-D., Choi H.-J., Buh G.H., Kang C.J., Jung J.H., Choi S.S., Jeon D., Kuk Y. Characterization of two by two electron-beam microcolumn array aligned with field emission array // Journal of Vacuum Science & Technology B. 1998. Vol. 16, P. 826–828. DOI:
10.1116/1.589915
12. Roberts R.H., Gomati M.M., Kudjoe J., Barkshire I.R., Bean S.J., Prutton M.A. Miniature, all-electrostatic, field emission electron column for surface analytical microscopy // Measurement Science and Technology. 1997. Vol. 8, no. 5. Id. 536. DOI: 10.1088/0957-0233/8/5/012
13. Zlatkin A., Garcia N. Low-energy (300 eV) versatile scanning electron microscope with 30 nm resolution // Microelectronic Engineering. 1999. Vol. 45, no. 1. P. 39–46. DOI: 10.1016/S0167-9317(98)00260-3
14. Zlatkin A., Garcia N. Functional scanning electron microscope of low energy with integrated electron optical system for nanolithography // Microelectronic Engineering. 1999. Vol. 46. P. 213–217. DOI: 10.1016/S0167-9317(99)00065-9
15. Ruska E. The development of the electron microscope and of electron microscopy (Nobel Lecture) // Angewandte Chemie International Edition in English. 1987. Vol. 26, iss. 7. P. 595–705. DOI: 10.1002/anie.198705953
16. Kratschmer E., Kim H.S., Thomson M.G.R., Lee K.Y., Rishton S.A., Yu M.L., Chang T.H.P. An electron‐beam microcolumn with improved resolution, beam current, and stability // Journal of Vacuum Science & Technology B. 1995. Vol. 13. P. 2498–2503. DOI: 10.1116/1.588381
17. Bubeck C.-D., Fleischmann A., Knell G., Lutsch R.Y., Plies E., Winkler D. Miniature electrostatic lens for generation of a low-voltage high current electron probe // Nuclear Instruments and Methods in Physics Research A. 1999. Vol. 427, no. 1-2. P. 104–108. DOI: 10.1016/S0168-9002(98)01552-6
18. Kim Y.C., Ahn S.J., Oh T.S., Kim D.W., Kim H.S., Jang W.K. Low energy microcolumn for large field view inspection // Ultramicroscopy. 2011. Vol. 111, no. 12. P. 1645–1649. DOI: 10.1016/j.ultramic.2011.09.016
19. Shi Y., Ardanuc S., Lal A. Micro-Einzel lens for waferintegrated electron beam actuation // IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). 2013. P. 189–192. DOI: 10.1109/MEMSYS.2013.6474209
20. van Veen A.H.V., Hagen C.W, Barth J.E., Kruit P. Reduced brightness of the ZrO/W Schottky electron emitter // J. Vac. Sci. Technol. B. 2001. Vol. 19, no. 6. P. 2038–2044. DOI: 10.1116/1.1409390
21. Schwind G., Magera G., Swanson L. Comparison of parameters for Schottky and cold field emission sources // J. Vac. Sci. Technol. B. 2006. Vol. 24, no. 6. P. 2897–2901. DOI: 10.1116/1.2366675
22. Bronsgeest M.S., Barth J.E., Swanson L.W., Kruit P. Probe current, probe size, and the practical brightness for probe forming systems // Journal of Vacuum Science & Technology B. 2008. Vol. 26, no. 3. P. 949–955. DOI: 10.1116/1.2907780
23. Barth J.E., Kruit P. Addition of different contributions to the charged particle probe size // Optik. 1996. Vol. 101, no 3. P. 101–109.
24. Crewe A.V. Optimization of small electron probes // Ultramicroscopy. 1987. Vol. 23, no. 2. P. 159–167. DOI: 10.1016/0304-3991(87)90161-6
25. Feinerman A.D., Crewe D.A. Three-dimensional fabrication of miniature electron optics // Advances in Imaging and Electron Physics. 2002. Vol. 121. P. 91–142. DOI: 10.1016/S1076-5670(02)80026-X
26. Loyd J.S. Miniature electron microscope beam column optics. Dissertations, LOUIS (University of Alabama in Huntsville), 2015. 177 p. URL: https://louis.uah.edu/uahdissertations/85
27. Sise O., Ulu M., Dogan M. Characterization and modeling of multi-element electrostatic lens systems // Radiation Physics and Chemistry. 2007. Vol. 76, no. 3. P. 593–598. DOI: 10.1016/j.radphyschem.2005.11.037
28. Comsol Documentation https://blogs.ethz.ch/ps_comsol/files/2020/05/COMSOL MultiphysicsUsersGuide.pdf
29. Hawkes P., Kasper E. Principles of Electron Optics. Elsevier Ltd., vol. 2, 2018. 1455 p.
30. Хокс П. Электронная микроскопия / Перевод с англ. под ред. И.Г. Стояновой. Москва: Мир, 1974. 319 с.
31. Ruan Z., Zhang M., Zeng R.G., Ming Y., Da B., Mao S.F., Ding Z.J. Simulation study of the atomic resolution secondary electron imaging // Surface and Interface Analysis. 2014. Vol. 46, no. 12-13. P. 1296–1300. DOI: 10.1002/sia.5565
32. Steinwand E., Longchamp J.-N., Fink H.-W. Fabrication and characterization of low aberration micrometer-sized electron lenses // Ultramicroscopy. 2010. Vol. 110, no. 9. P. 1148–1153. DOI: 10.1016/j.ultramic.2010.04.013
33. Oh T.-S., Kim D.-W., Ahn S., Kim H.S. Improvement of the Probe Current in a Microcolumn by Introducing a Subsidiary Electrode in a Source Lens // Journal of the Korean Physical Society. 2013. Vol. 63, no. 6. P. 1128–1133. DOI: 10.3938/jkps.63.1128
34. Fowler R.H., Nordheim L. Electron Emission in Intense Electric Fields // Proceedings of the Royal Society A. Vol. 119, no. 781. P. 173–181. DOI: 10.1098/rspa.1928.0091
35. Kim H.S., Kim D.W., Ahn S.J., Kim Y.C., Park S.S. The Assembly of a Fully Functional Microcolumn and Its STEM-Mode Operation // Journal of the Korean Physical Society. 2003. Vol. 43, no. 5. P. 831–835. URL: https://www.jkps.or.kr › journal › download_pdf
36. Minh P.N., Ono T., Sato N., Mimura H., Esashi M. Microelectron field emitter array with focus lenses for multielectron beam lithography based on silicon on insulator wafer // J. Vac. Sci. Technol. B. 2004. Vol. 22, no. 3. P. 1273–1276. DOI: 10.1116/1.1738118
37. Gaskin J., Abbott T., Medley S., Patty K., Gregory D., Thaisen K., Ramsey B., Jerman G., Sampson A., Harvey R., Taylor L. Miniaturized Scanning Electron Microscope for In‐Situ Planetary Studies // Proc. "Earth and Space 2010: Engineering, Science, Construction, and Operations in Challenging Environments". 2010. ASCE. DOI: 10.1061/41096(366)113
38. Tuggle D.W., Li J.Z., Swanson L.W. Point cathodes for use in virtual source electron optics // Journal of Microscopy. 1985. Vol. 140, no. 3. P. 293–301. DOI: 10.1111/j.1365-2818.1985.tb02683.x
39. Sise O., Ulu M., Dogan M. Exploring focal and aberration properties of electrostatic lenses through computer simulation // Eur. J. Phys. 2008. Vol. 29, no. 6. P. 1165–1176. DOI: 10.1088/0143-0807/29/6/005
40. Wen Y., Du Z., Pan L. Design of electrostatic microcolumn for nanoscale photoemission source in massively parallel electron-beam lithography // J. Micro/Nanolith. MEMS MOEMS. 2015. Vol. 14, no. 4. Id. 043508. 7 pages. DOI: 10.1117/1.JMM.14.4.043508
41. Cerezo A., Miller M.K. Einzel lenses in atom probe designs // Surface Science. 1991. Vol. 246. P. 450–456. DOI: 10.1016/0039-6028(91)90450-7
42. Sise O., Ulu M., Dogan M. Multi-element cylindrical electrostatic lens systems for focusing and controlling charged particles // Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2005. Vol. 554, no. 1-3. P. 114–131. DOI: 10.1016/j.nima.2005.08.068
43. Eastham D.A., Edmondson P., Greene S., Donnelly S., Olsson E., Svensson K., Bleloch A. A design for a subminiature, low energy scanning electron microscope with atomic resolution // Journal of Applied Physics. 2009. Vol. 105, no. 1. Id. 014702. DOI: 10.1063/1.3058602
44. Krysztof M., Grzebyk T., Górecka-Drzazga A., Adamski K. Dziuban J. Electron optics column for a new MEMS-type transmission electron microscope // Bulletin of the Polish Academy of Sciences, Technical Sciences. 2018. Vol. 66. P. 133–137. DOI: 10.24425/119067
45. Krysztof M. Design of an Einzel Lens with Square CrossSection // Electronics. 2021. Vol. 10, no. 19. Id. 2338. DOI: 10.3390/electronics10192338
46. Baranova L.A., Yavor S.Ya., Read F.H. Crossed aperture lenses for the correction of chromatic and aperture aberrations // Rev. Sci. Instrum. 1996. Vol. 67, no. 3. P. 756–760. DOI: 10.1063/1.1146805
47. Krysztof M., Białas M., Szyszka P., Grzebyk T., GóreckaDrzazga A. Fabrication and characterization of a miniaturized octupole deflection system for the MEMS electron microscope // Ultramicroscopy. 2021. Vol. 225. Id. 113288. DOI: 10.1016/j.ultramic.2021.113288
48. Балашов В.Н., Данильчев С.С. Перспективы создания миниатюрных электронно-оптических систем // Известия РАН. Сер. физич. 2003. T. 67, № 4. C. 566–567. URL: https://elibrary.ru/item.asp?id=17287629
49. Балашов В.Н., Данильчев С.С. Перспективы создания адаптивных электронно-оптических систем // Известия РАН. Сер. физич. 2003. T. 67, № 4. 2003, C. 563–565. URL: https://elibrary.ru/item.asp?id=17287628
50. Данильчев С.С., Балашов В.Н. Миниатюрная электронно-оптическая система. Патент РФ по заявке № 2004120393/22 (023284) от 14.07.2004 г. URL: https://rusneb.ru/catalog/000224_000128_0000045202_20050427_U1_RU/
51. van Bruggen M.J., van Someren B., Kruit P. Electron optics of skewed micro-Einzel lenses // Journal of Vacuum Science & Technology B. 2009. Vol. 27. P. 139–147. DOI: 10.1116/1.3071850
52. Oh T.-S., Kim H.-S., Ahn S., Kim D.W. Design of an ultraminiaturized electron optical microcolumn with sub-5 nm very high resolution // Ultramicroscopy. 2014. Vol. 136. P. 171–175. DOI: 10.1016/j.ultramic.2013.10.003
53. Kim H.W., Lee Y.B., Kim D.-W., Ahn S., Oh T.-S., Kim H.S., Kim Y.C. Variations of the field of view depending on the Si deflector shape in a microcolumn // J. Vac. Sci. Technol. B. 2018. Vol. 36, no. 6. Id. 06J902. DOI: 10.1116/1.5048128
54. Williams D.B., Carter C.B. Transmission Electron Microscopy A. Textbook for Materials Science. Springer, 2009. 779 p. URL: https://link.springer.com/book/10.1007/978-0-387-76501-3
55. van Aken R.H., Hagen V., Barth J.E., Kruit P. Low-energy foil aberration corrector // Ultramicroscopy. 2002. Vol. 93, no. 3-4. P. 321–330. DOI: 10.1016/S0304-3991(02)00287-5
56. Kazmiruk V.V., Savitskaja T.N. New Principles of Designing Multibeam Electron-Optical Microsystems for Diagnostics of Semiconductor Structures // Bulletin of the Russian Academy of Sciences: Physics. 2009. Vol. 73, no. 4. P. 461–464. DOI: 10.3103/S1062873809040042
57. van Aken R.H., Maas D.J., Hagen C.W., Barth J.E., Kruit P. Design of an aberration corrected low-voltage SEM // Ultramicroscopy. 2010. Vol. 110, no. 11. P. 1411–1419. DOI: 10.1016/j.ultramic.2010.07.012
58. Gaskin J., Jerman G., Medley S., Gregory D., Abbott T., Sampson A. Simulation and characterization of a miniaturized Scanning Electron Microscope // IEEE Aerospace Conference Proceedings. 2011. P. 1–10. DOI: 10.1109/AERO.2011.5747297
59. Crewe A.V., Eggenberger D.N., Wall J., Welter L.M. Electron Gun Using a Field Emission Source // Rev. Sci. Instrum. 1968. Vol. 39, no. 4. P. 576–583. DOI: 10.1063/1.1683435
60. Laszczyk K., Krysztof M. Electron beam source for the miniaturized electron microscope on-chip // Vacuum. 2021. Vol. 189. Id. 110236. DOI: 10.1016/j.vacuum.2021.110236
61. Sharma A., Kanth S.K., Kim H.S., Kim D.-W., Ahn S.J., Oh T.-S., Kim Y.C. Comparison of Electron Emission Characteristics of W and CNT Field Emitter for Microcolumn // Asian Journal of Chemistry. 2017. Vol. 29, no. 8. P. 1690–1692. DOI: 10.14233/ajchem.2017.20543
62. Shao X., Srinivasan A., Ang W.K., Khursheed A. A highbrightness large-diameter graphene coated point cathode
field emission electron source // Nature Communications.
2018. Vol. 9. Id. 1288. DOI: 10.1038/s41467-018-03721-y
63. van Aken R.H., Janssen M.A.P.M., Hagen C.W., Kruit V. A simple fabrication method for tunnel junction emitters // Solid-State Electronics. 2001. Vol. 45, no 6. P. 1033–1038. DOI: 10.1016/S0038-1101(01)00153-8
64. Горбенко О.М., Сапожников И.Д., Вересов С.О., Фельштын М.Л., Голубок А.О. Исследование электронно-оптической системы с электростатической микролинзой и автоэмиссионным катодом на основе СТМ // ХХIX Симпозиум "Нанофизика и Наноэлектроника", Н-Новгород, 10-14 марта 2025 г. Тезисы докладов. C. 447–447. URL: https://nanosymp.ru/ru/proceedings
65. Wicki F., Longchamp J.-N., Escher C., Fink H.-W. Design and implementation of a micron-sized electron column fabricated by focused ion beam milling // Ultramicroscopy. 2016. Vol. 160. P. 74–79. DOI: 10.1016/j.ultramic.2015.09.013
66. Sinno I., Sanz-Velasco A., Kang S., Jansen H., Olsson E., Enoksson P., Svensson K. Fabrication of nanoscale electrostatic lenses // J. Micromech. Microeng. 2010. Vol. 20, no. 9. Id. 095031 (7 pages). DOI: 10.1088/0960-1317/20/9/095031
67. Lutsch R.Y, Plies E. Initial resolution measurements of miniaturized electrostatic lenses for LVSEM // Ultramicroscopy. 2002. Vol. 93, no. 3-4. P. 339–345. DOI: 10.1016/S0304-3991(02)00289-9
68. Muray L.P., Silver C.S., Spallas J.P. Sub- lithography with miniature electron beam columns // Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. 2006. Vol. 24, no. 6. P. 2945–2950. DOI: 10.1116/1.2375088
69. Spallas J.P., Silver C.S., Muray L.P., Wells T., ElGomati M. A manufacturable miniature electron beam column // Microelectronic Engineering. 2006. Vol. 83, no. 4-9. P. 984–989. DOI: 10.1016/j.mee.2006.01.245
70. Kazmiruk V., Savitskaja T. Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection // arXiv:0805.0495v1 [physics.optics]. 2008. 16 pages. DOI: 10.48550/arXiv.0805.0495
71. Suwal O.K., Sharma A., Lee Y.B., Oh T.S., Kim D.W.,
Kim H.S. Influence of Einzel lens structure on the performance of a microcolumn fabricated through MEMS technology // Advanced Materials Research. 2013. Vol. 694-697. P. 1001–1007. DOI: 10.4028/www.scientific.net/AMR.694-697.1001
72. Longchamp J.-N., Latychevskaia T., Escher C., Fink H.-W. Non-destructive imaging of an individual protein // Phys. Lett. 2012. Vol. 101, no. 9. Id. 093701. DOI: 10.1063/1.4748113
73. Gaskin J., Jerman G., Gregory D., Sampson A. Miniature Variable Pressure Scanning Electron Microscope for in-situ imaging & chemical analysis // IEEE Aerospace Conference Proceedings. 2012. P. 1–10. DOI: 10.1109/AERO.2012.6187064
74. Own C. et al. Mochii Portable Spectroscopic Electron Microscope on Iss: Progress Toward Flight // 50th Lunar and Planetary Science Conference 2019 (LPI Contrib. No. 2132), 2019. URL: https://www.hou.usra.edu/meetings/lpsc2019/pdf/3238.pdf
75. Own C., Murfitt M.F. Mochii.United States Patent No. US 9.997.331. B1. 12.06.2018.
76. Own C., Clemett S., Zia R., Martinez J., Own S., Morales Z., Koene R., Pettit D.R. Electron Microscopy and Analysis of Martian Meteorite ALH84001 with Mochii ISS-NL on the International Space Station // Microscopy and Microanalysis. 2022. Vol. 28, no. S1. P. 2712–2718.
DOI: 10.1017/S1431927622010224
77. Golubok A.O., Timofeev V.A. STM combined with SEM without SEM capability limitations // Ultramicroscopy. 1992. Vol. 42-44, part 2. P. 1558-1563. DOI: 10.1016/0304-3991(92)90483-Z
78. Sapozhnikov I.D., Gorbenko O.M., Felshtyn M.L., Zhukov M.V., Golubok A.O. Features of combining of scanning probe microscopy with optical and scanning electron microscopy // IOP Conference Series: Materials Science and Engineering. 2019. Vol. 699. Id. 012040. (6 pages). DOI: 10.1088/1757-899X/699/1/012040

Еще

Низковольтные миниатюризованные электронно-оптические системы. Обзор

Похожие статьи в разделе Электричество. Магнетизм. Электромагнетизм

Low-voltage miniaturized electron-optical systems: review

Список литературы Низковольтные миниатюризованные электронно-оптические системы. Обзор