Низковольтные миниатюризованные электронно-оптические системы. Обзор

Автор: С.О. Вересов, О.М. Горбенко, А.О. Голубок

Журнал: Научное приборостроение @nauchnoe-priborostroenie

Статья в выпуске: 4, 2025 года.

Бесплатный доступ

Низковольтные миниатюризованные электронно-оптические системы, которые также называют микроколоннами, представляют собой самостоятельное направление в области электронной оптики и являются основой низковольтных миниатюрных электронных микроскопов, многоколоночных литографов и систем электронной голографии. В обзоре собраны работы по микроколоннам с различными электронно-оптическими схемами, включая моделирование распределения электрического поля, электронных траекторий, аберраций и пространственного разрешения, а также описание используемых электронных источников и технологий изготовления микроколонн.

Низковольтная электронная микроскопия, миниатюрные электронно-оптические системы, микроколонны, электростатические микролинзы, точечные источники электронов, пространственное разрешение, аберрации электронно-оптических систем, групповые технологии микроэлектроники, кремниевые технологии

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Список литературы Низковольтные миниатюризованные электронно-оптические системы. Обзор

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