Noise minimized high resolution digital holographic microscopy applied to surface topography
Автор: Achimova Elena, Abaskin Vladimir, Claus Daniel, Pedrini Giancarlo, Shevkunov Igor, Katkovnik Vladimir
Журнал: Компьютерная оптика @computer-optics
Рубрика: Дифракционная оптика, оптические технологии
Статья в выпуске: 2 т.42, 2018 года.
Бесплатный доступ
The topography of surface relief gratings was studied by digital holographic microscopy. The applicability of the method for quantitative measurements of surface microstructure at nanoscale was demonstrated. The method for wavefront reconstruction of surface relief from a digital hologram recorded in off-axis configuration was also applied. The main feature is noise filtration due to the presence of noise in the recorded intensity distribution and the use of all orders of the hologram. Reconstruction results proved a better effectiveness of our approach for topography studying of relief grating patterned on a ChG As2S3 - Se nanomultilayers in comparison with standard Fourier Transform and Atom Force Microscope methods.
Digital holography, digital image processing, diffraction gratings
Короткий адрес: https://sciup.org/140228726
IDR: 140228726 | DOI: 10.18287/2412-6179-2018-42-2-267-272
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