Models of forced motion of micro accelerometer
Автор: Maksimov P.v
Статья в выпуске: 1, 2011 года.
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The MEMS-accelerometer is described in the article. The motion equations are obtained for this device. The law of motion of pendulum taking into account the influence of electrostatic forces is showed. At the article the coupled electro-mechanical 3D-model of accelerometer is demonstrated.
Micromechanics, mems (микроэлектромеханическая система), mems, theory of elasticity, accelerometer, forced motion, coupled problem, steady-state electricity
Короткий адрес: https://sciup.org/146211366
IDR: 146211366
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