On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures.I. General description of main lines of research
Автор: Semenenko A.I.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Обзоры
Статья в выпуске: 2 т.15, 2005 года.
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This paper, which starts a series of papers, gives a general description of main lines of research directly related to the new capabilities of "" ellipsometry, metrology of ellipsometry, and real surface structure.
Короткий адрес: https://sciup.org/14264388
IDR: 14264388
Статья обзорная