On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 6. Ellipsometry of multilayer absorbing systems. A brief outline
Автор: Semenenko A.I., Semenenko I.A.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Исследования, приборы, модели и методы анализа
Статья в выпуске: 4 т.16, 2006 года.
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The paper discusses general problems of the ellipsometry of absorbing media directly related to the inverse problem solution. The angles of perfect polarization for a single-layer system with an absorbing film of arbitrary thickness are studied. A fundamental equation of the ellipsometry of an N-layer system with a particular j-layer based on recurrent relationships is considered in detail. The Holms method is extended to the multi layer medium case. A general characteristic of the approach to the solution of the inverse ellipsometry problem for multilayer absorbing systems is given. It is based on new criteria of finding an optimal solution using basic formulas of the Holms method extended to N-layer systems.
Короткий адрес: https://sciup.org/14264457
IDR: 14264457